General Information

  • Compact hardcoating unit
  • Based on PLATIT LARC® technology (LAteral Rotating Cathodes)
  • Coating on tool steels (TS) above 200°C, high speed steels (HSS) 350 - 500°C and on tungsten carbide (WC) between 350 - 600°C
Hard Coatings
  • Standard: TiN, TiAlN, AlTiN, nACo®
  • Optional: TiCN-MP,TiCN, cVIc®, TiAlCN, GRADVIC®, CrN, CROMVIC®, CrTiN, CROMTIVIC®, Ti2N, ZrN, AlCrN, AlTiCrN, nACo®, Fi-Vlc®, nACRo®, nACVIc®,
  • Monolayers, Multilayers, nanogradients, nanolayers, nanocomposities, and their combinations.
Hardware
  • Foot print: W1890 x D1500 x H2120 mm
  • Vacuum chamber with internal sizes of:
  • W450 x D320(460) x H615 mm
  • Usable plasma volume: Ø355 x H440 mm
  • System with turbo molecular pump
  • Revolutionary rotating (tubular) cathode system
  • with 2 LARC® cathodes:
    • LARC® target size: Ø96 x 510 mm
    • Magnetic Coil Confinement (MACC) for ARC control
    • Double wall, stainless steel, water cooled chamber and cathodes
    • Changing time for skilled operator: approx. 15 min / cathode
  • Virtual Shutter® and Tube Shutters®
  • Ionic plasma cleaning:
    • etching with gas (Ar/H ); glow discharge, 2
    • metal ion etching (Ti, Cr)
  • DC-BIAS supply as default - Pulsed BIAS optional
  • Air conditioning for the electric cabinet
  • Special heaters with dust filter
  • Electrical connection:
  • 3x400V, 100A external fuse 50-60 Hz, 30 kW
Electronics and Software
  • Industrial PLC system
  • Control system with touch-screen menu driven concept
  • Manual and automatic process control
  • Data logging and real-time viewing of process parameters
  • Remote diagnostics
  • No programming knowledge is required for process control
  • Operator's manual on CD-ROM
  • Upgradeable to 111+DLC and 111+OXI on user's place
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