High performance compact coating unit

General Information

  • Compact hard coating unit
  • Based on PLATIT LARC® , CERC® and SCiL® technologies LAteral Rotating Cathodes, CEntral Rotating Cathodes and Sputtered Coatings induced by LARC-GD®
  • Coating on tool steels (TS) above 230 °C, high speed steels (HSS) 350 - 500 °C and on tungsten carbide (WC) between 350 - 550 °C
  • Reconfigurable by the user into different cathode setups:
    • A: 3 LARC® cathodes and 1 CERC® cathode
    • B: 3 LARC® cathodes ( 411-ECO)
    • C: 3 LARC® cathodes and 1 SCiL® cathode
Coatings
  • Monolayers, Multilayers, Nanogradients, Nanolayers, Nanocomposites, TripleCoatings3®, QuadCoatings4®, SCiL® -Coatings and their combinations
  • Main standard coatings: AlCrN3®, nACRo4®, AlTiCrN4®
  • All available Triple Coatings
  • All available QUAD Coatings
  • All SCiL® - Coatings available
Hardware
  • Foot print: W2720 x D1721 x H2149 mm
  • Vacuum chamber, internal sizes: W650 x D670 x H675 mm
  • Usable plasma volume: Ø500 x H460 mm
  • Max. load: 200 kg
  • System with turbo molecular pump
  • Revolutionary rotating (tubular) cathode system with 3 LARC® / CERC® cathodes:
    • Magnetic Coil Confinement (MACC) for ARC control
    • LARC® : Up to 200A ARC current
      • Changing time for skilled operator: approx. 15-30 min/cathode
    • CERC® : Up to 300A ARC current
    • SCiL® : Up to 30 kW sputtering power
  • VIRTUAL SHUTTER® and TUBE SHUTTER® for all LARC® cathodes
  • Ionic plasma cleaning:
    • etching with gas (Ar/H2); glow discharge
    • metal ion etching (Ti, Cr)
  • LGD® : LARC ® Glow Discharge
  • Pulsed BIAS supply (350 kHz)
  • 6 (+1) gas channels, 6 MFC controlled
  • Special dust filters for heaters (24 kW)
  • Electrical connection: 3x400 V, 160 A, 50-60 Hz
  • Total power consumption: < 76 kVA
Electronics and Software
  • See features at π80
  • Enhanced operating software compatible to π111
Cycle Times*
  • Shank tools (2 μm): ø 10 x 70 mm, 504 pcs: 3.5 h
  • Inserts (3 μm): ø 20 x 6 mm, 2940 pcs: 4.0 h
  • Hobs (4 μm): ø 80 x 180 mm, 14 pcs: 5.5 h
*: The cycle times can be achieved under the following conditions:
  • solid carbide tools (no outgassing necessary)
  • high quality cleaning before the coating process (short etching)
  • continuous operation (pre-heated chamber)
  • 4-cathode processes
  • use of fast cooling (e.g. with helium, opening the chamber at 200°C)

 

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